AI Bibliography
AI Bibliography |
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van den Brink, M. 2020, Holistic lithography in the age of the artificial intelligence of things. Paper presented at Extreme Ultraviolet Lithography 2020. |
| Resource type: Proceedings Article BibTeX citation key: vandenBrink2020 View all bibliographic details  |
Categories: Artificial Intelligence, Computer Science, Engineering, General, Geopolitical, Military Science Subcategories: 5G, Autonomous systems, Cloud computing, Deep learning, Edge AI, Internet of things, JADC2, Japan, Machine learning, Military research, Nanotechnology, Networked forces, Neurosymbolic, United States Creators: van den Brink Publisher: International Society for Optics and Photonics Collection: Extreme Ultraviolet Lithography 2020 |
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| Abstract |
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The convergence of 5G, artificial intelligence and billions of connected devices will start a new wave of innovation, bringing advanced computing power to massive amounts of data. This is the era of the Artificial Intelligence of Things. The key enabler continues to be affordable scaling, driven by advanced lithography, computational capabilities, fast metrology and inspection. In his keynote, ASML President and CTO Martin van den Brink will look at the key developments across ASML’s holistic product portfolio.
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